The demands of 300mm microelectronic technology requires a stage that has both extended travel range in addition to the highest positioning performance. The LEP 12”x12” stage is designed to meet or exceed those requirements.

The stable design employs over sized stainless steel crossed roller bearing guide ways. Heavy components assure the long-term stability. Without compromise, this stage minimizes its three dimensional envelope with clever design and strict manufacturing processes.

The stage is available with either stepper motors or DC servo motors. Coupled with precision ballscrews, performance is maintained at all speeds. Maintenance is minimal. Standard on all stages are high resolution rotary encoders which provide position feedback.

The optional XY grid encoder adds increased performance for the most demanding applications. With 0.4 micron repeatability and very high accuracies these stages are very well suited for microscope applications such as defect review and bit mapping.

Unique Design

The LEP robot has many design features that make it unique. First, the platform mount vastly improves the ease of assembly and service. The telescoping lift axis provides long range of motion while requiring very little space. The linear radius axis and precision rotation axis ensure the highest wafer placement accuracy.

Flexible Integration

A rich command set via either the RS-232 or the USB interface provides for multi-level control. At the most fundamental level, full control of all motion parameters and servo characteristics is available. In addition, a complete high level command set provides control of wafer transport, system status and error handling.

High Reliabilty

The LEP 300mm robot is designed for high reliability. There are no complicated mechanisms, drive trains or multi-link arms that are prone to failure and misalignment.

Serviceable

While the 300mm robot is designed to be very reliable, it is also designed for easy service and maintenance. Owing to the unique design, maintenance can be performed with the robot installed in place, no time consuming removal is necessary. For the same reasons, most repairs can be performed in place as well.

Expandable

Optional accessories can expand the handling system to a complete automation system. With the MAC 6000 controller as a foundation, accessories such as a cassette mapper, notch aligner and XY positioning stage can be added to build a complete automation package. Custom accessories can be added as well.